Tag: optics
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Out-of-plane stroboscopic analysis of MEMS motion sensors
Goal: implement a system for optical stroboscopic analysis of TDK’s MEMS accelerometers and gyroscopes, aimed at the characterization of out-of-plane resonant modes in those devices Strategy: enhance TDK’s existing system for in-plane stroboscopic optical analysis, based on the usage of infrared microscope and synchronously controlled light source, to add the out-of-plane capability. Work phases Estimated