Tag: characterization
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Experimental characterization of nonlinear motion of MEMS resonators
Mechanical nonlinearities play an important role in inertial MEMS sensors, in particular due to geometrical and process constraints. The trend to push the performance to the limits caused second-order nonlinear effects to become a critical phenomenon that must be taken into account: these effects are already visible and characterized on mass production devices. Several methods
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Out-of-plane stroboscopic analysis of MEMS motion sensors
Goal: implement a system for optical stroboscopic analysis of TDK’s MEMS accelerometers and gyroscopes, aimed at the characterization of out-of-plane resonant modes in those devices Strategy: enhance TDK’s existing system for in-plane stroboscopic optical analysis, based on the usage of infrared microscope and synchronously controlled light source, to add the out-of-plane capability. Work phases Estimated