Category: TDK InvenSense
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Mechanical nonlinearities (Geometric or Contact) in inertial MEMS sensors
Mechanical nonlinearities play an important role in inertial MEMS sensors and cannot be avoided. The trend to push the performance to the limits caused second-order nonlinear effects to become a critical phenomenon that must be considered: these effects are already visible and characterized on mass production devices. External shocks and vibrations could also induce other
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Experimental characterization of nonlinear motion of MEMS resonators
Mechanical nonlinearities play an important role in inertial MEMS sensors, in particular due to geometrical and process constraints. The trend to push the performance to the limits caused second-order nonlinear effects to become a critical phenomenon that must be taken into account: these effects are already visible and characterized on mass production devices. Several methods
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Out-of-plane stroboscopic analysis of MEMS motion sensors
Goal: implement a system for optical stroboscopic analysis of TDK’s MEMS accelerometers and gyroscopes, aimed at the characterization of out-of-plane resonant modes in those devices Strategy: enhance TDK’s existing system for in-plane stroboscopic optical analysis, based on the usage of infrared microscope and synchronously controlled light source, to add the out-of-plane capability. Work phases Estimated
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Contact dynamics in inertial MEMS sensors
Nowadays, mechanical robustness is a key spec for inertial MEMS sensors. The contacts occurring in silicon structures are a relevant problem that may generate dangerous particles or even cause the breakage of the MEMS sensor. Despite these critical phenomena impacting the sensor’s manufacturing and lifetime functionality, the modeling approaches currently adopted are too simplified. The
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Design of MEMS structure for adhesion characterization
Stiction is a critical phenomenon in MEMS structure which consists in the movable MEMS structure being unable to release from fixed structure when engaged. Stiction depends on many physical mechanisms but can be simplified to a negative balance between restoring forces which try to unstuck the movable mass and the adhesion forces which keep the