Contact dynamics in inertial MEMS sensors

Nowadays, mechanical robustness is a key spec for inertial MEMS sensors. The contacts occurring in silicon structures are a relevant problem that may generate dangerous particles or even cause the breakage of the MEMS sensor. Despite these critical phenomena impacting the sensor’s manufacturing and lifetime functionality, the modeling approaches currently adopted are too simplified. The thesis uses cutting-edge contact dynamics theory to describe the contacts in micromachined silicon structures, focusing on friction and potential chipping. The simulation results will be compared with experimental observations on dedicated MEMS structures, with the final goal of improving failure predictability. The thesis will be carried out in collaboration with TDK InvenSense.

Contacts: Francesco Braghin, Jacopo Marconi

Companies: TDK InvenSense