Stiction is a critical phenomenon in MEMS structure which consists in the movable MEMS structure being unable to release from fixed structure when engaged. Stiction depends on many physical mechanisms but can be simplified to a negative balance between restoring forces which try to unstuck the movable mass and the adhesion forces which keep the mass stuck into the fixed surface. At a first order, the adhesion force could be thought as a global parameter that is independent from design choices and could be characterized independently. The goal of the master thesis would be to design simple structures that are able to quantify the adhesion force. The thesis will be carried out at TDK InvenSense.